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by Cientifica 01 Nanotechnology

By Paul Holister, Cristina Roman, Tim Harper, Cientifica

October 2003

Lithographic tools and techniques can be expected to contribute to nanotechnological development, especially in the area of nanoelectromechanical systems (NEMS) and for provision of the larger-scale supporting and connecting structures for other developments, such as molecular electronics and lab-on-a-chip systems. Different approaches will be briefly described in this white paper.

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