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by Cientifica 01 Nanotechnology

By Paul Holister, Cristina Roman, Tim Harper, Cientifica

October 2003

MEMS-based mechanical devices are shrinking in thickness and width to reduce mass, increase resonant frequency, and decrease forces involved in the systems. New methods for creating and detecting motion at the nanoscale are emerging. As with much nanotechnology, developing features smaller than the wavelength of light causes new properties to appear. Making nanoscale mechanical objects represents a real challenge.

The white paper describes some of the recent research developments in fabricating nanodevices.

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